现代显示, 2010, 21 (1): 10, 网络出版: 2010-05-31
扫描电镜的原理及TFT-LCD生产中的应用
Principle of SEM and Application in TFT-LCD Production
摘要
文章以扫描电镜（SEM）在TFT-LCD中的应用为题，介绍了扫描电镜的原理、构造，并通过实验数据分析对TFT-LCD生产中相关缺陷的产生原因进行调查。
Abstract
This paper makes scanning electron microscopy(SEM) application in the TFT-LCD manufacture, introduces the principle of scanning electron microscopy and TFT panel process.Through experimental data analysis, investigate some defect reason in the production of TFT panels.
张新言, 李荣玉. 扫描电镜的原理及TFT-LCD生产中的应用[J]. 现代显示, 2010, 21(1): 10. ZHANG Xin-yan, LI Rong-yu. Principle of SEM and Application in TFT-LCD Production[J]. ADVANCED DISPLAY, 2010, 21(1): 10.
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