以正硅酸乙酯(TEOS)和硅油为前驱体，在碱性催化体系中制备出有机硅改性二氧化硅溶胶，采用提拉法获得了具备疏水性能的二氧化硅减反膜。通过透射电镜、扫描探针显微镜、红外光谱、分光光度计、表面轮廓仪等多种方法研究了改性后的膜层性能。在高湿度环境中存放两周后，在波长确定的情况下，常规二氧化硅减反膜透过率由99．2%降到了96．5%，疏水改性膜层透过率仍然高于99%。与常规减反膜相比，疏水改性减反膜在高湿度条件下防止潮气侵蚀的性能得到了大幅度的提高。

Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM),IR spectrum,ultraviolet-visible spectrophotometry,etc. The results show that the transmittance can be more than 99.5% ,the surface is smoth,and hydrophobic performance is raised.