光学技术, 2007, 33 (4): 0632, 网络出版: 2010-06-03
高精度大口径平面镜瑞奇-康芒定量检测的精度影响因素分析
Analysis of the influencing factors on Ritchey-Common quantitative measurement for large high precision flat
摘要
针对前人的数学模型,对瑞奇角、旋转角和系统波像差这几个主要精度影响因素进行了仿真分析。结果表明:当瑞奇角的测量误差控制在0.5°以内时,对测量结果影响很小;由于平面镜的面形误差是连续和旋转对称的,所以旋转角测量误差对测量结果影响很小;当系统波像差系数的测量误差|△Wn,m|≥0.05λ时会影响拟合精度。此仿真结果为提高大口径平面镜检测精度提供了理论依据。
Abstract
In view of the mathematics model,Simulation and analysis for several main influencing factors such as measurement errors of Ritchey angle,rotation angle and wave-front aberrations is carried out. Results show that the Ritchey angle measurement error to be less than 0.5° is insensitive to the testing accuracy. If the figure errors of flat are consecutive and revolving symmetrical,influence is small to testing result. Wave-front aberrations in the event of |△Wn,m|≥0.05λ influence on fitting accuracy. The simulation result provides theory basis for improving the measurement precision of large flat.
田秀云, 吴时彬, 伍凡, 陈强, 侯溪, 吴永前. 高精度大口径平面镜瑞奇-康芒定量检测的精度影响因素分析[J]. 光学技术, 2007, 33(4): 0632. TIAN Xiu-yun, WU Shi-bin, WU Fan, CHEN Qiang, HOU Xi, WU Yong-qian. Analysis of the influencing factors on Ritchey-Common quantitative measurement for large high precision flat[J]. Optical Technique, 2007, 33(4): 0632.