采用电子束蒸发的方法，用石英晶体振荡法监控薄膜的蒸发速率，在不同工作气压下制备了ZrO₂薄膜样品．在相调制型椭圆偏振光谱仪和分光光度计上对样品的光谱特性进行了测试．根据波长漂移的理论，计算出薄膜的聚集密度．结果表明，随着工作气压的降低，薄膜的聚集密度和折射率都随之增大．

ZrO₂ coatings were prepared by electron beam evaporation at different deposition pressure,while deposition rate was monitored and demonstrated by quartz crystal oscillation. Used the new spectroscopic ellipsometer and spectrophotometer to test about the ZrO₂ deposited spectral character and measure the film refractive index. Calculated the packing density of thin-film according to wavelength deviation dispersion theory before and after the thin-film suck tide. It was found that the refractive index and packing density were increasing as the working pressure was decreasing.