光学学报, 2010, 30 (6): 1857, 网络出版: 2010-06-07
2000 lp/mm X射线透射变栅距光栅的研究
Study on Properties of 2000 lp/mm X-Ray Transmission Varied Line-Space Gratings
衍射光学 变栅距光栅 X射线透射光栅 电子束光刻 diffraction optics varied line-space gratings X-ray transmission gratings electron beam lithography
摘要
针对X射线透射光栅摄谱仪中对高线密度聚焦变栅距光栅的需要,利用电子束光刻技术,研制了X射线透射变栅距光栅。利用变栅距光栅的自动生成宏文件程序,优化设计了变栅距光栅的版图,然后利用电子束光刻和微电镀技术在聚酰亚胺薄膜底衬上制备了X射线透射变栅距光栅。制作出中心线数为2000 lp/mm X射线透射变栅距光栅,栅距变化符合设计要求。衍射效率标定的结果表明,制备的变栅距光栅在中心波长处聚焦作用明显,可以大幅提高衍射光强度和光栅的分辨本领,具有重要的应用价值。
Abstract
The manufacture of high-line-density X-ray transmission self-focusing varied line-space (VLS) gratings for X-ray spectroscopy by using electron beam lithography is reported. Firstly,the VLS gratings are automatically optimized and generated by the macro program. Then using the electron beam lithography and micro-electroplating technology,the VLS gratings are fabricated on polyimide membrane substrate. The 2000 lp/mm X-ray transmission VLS gratings are successfully obtained. It can be seen that the line space of the gratings are all desired. The calibration results of diffraction efficiency of the VLS gratings indicate that the VLS gratings have promising abilities to significantly improve the diffraction intensity and spectrum resolution in the central wavelength.
靳飞飞, 朱效立, 李海亮, 马杰, 谢常青, 刘世炳. 2000 lp/mm X射线透射变栅距光栅的研究[J]. 光学学报, 2010, 30(6): 1857. Jin Feifei, Zhu Xiaoli, Li Hailiang, Ma Jie, Xie Changqing, Liu Shibing. Study on Properties of 2000 lp/mm X-Ray Transmission Varied Line-Space Gratings[J]. Acta Optica Sinica, 2010, 30(6): 1857.