多腔诱导透射滤光片制备后出现的缺陷,严重地影响了薄膜样品的品质以及环境稳定性。实验用热蒸发的方法在室温浮法玻璃基底上制备了四腔诱导透射滤光片。用光学显微镜观测了缺陷的形貌,将缺陷分为不同类型的点状缺陷和线状缺陷,并结合光学轮廓仪和电子能量散射谱仪分析了缺陷的深度以及元素成份。分析结果显示,基片污染、喷溅以及应力、亚表面缺陷等综合因素是诱发缺陷产生的主要原因。为减少缺陷数量以及其尺寸和深度,实验验证了基底酸洗工艺对缺陷的抑制效果,证明了酸洗工艺具有可行性。最后结合缺陷产生的可能原因提出了制备工艺改进措施,已经取得了较好的成果。

Defects were shown on the multiple cavity induced transmission filters (ITF),which greatly affected the sample′s quality and environmental stability. Four-cavity ITF were prepared by evaporation method on the float glass at room temperature. Defects topographies were observed by optical microscope,and the defects were divided into different kinds of dig defects and scratch defects. Depth information and elementary composition of defects were obtained by optical profiler and EDS energy spectra analysis. The results showed the defects were mainly caused by unclean substrate,sputtering and other composite reasons like stress and sub-surface defects. In order to suppress the defect with numbers,width and depth,acid cleaning techniques were tested and confirmed effective. Good results achieved with improved techniques were made according to genetic analysis of defects.