基于微机电系统技术的近红外光谱探测系统已成为了近红外光谱仪研究的一个新方向。 文章提出了一种基于光栅光调制器的新型近红外光谱探测系统。 该系统采用微加工技术制造的光栅光调制器阵列与单点近红外探测器相结合使用的方法进行光谱探测。 设计了该光谱探测系统的光学结构, 论述了系统光谱探测原理, 并使用经表面微加工工艺得到的光栅光调制器器件进行了系统分辨本领、 波长准确性、 系统稳定性、 器件响应频率等特征参数测试实验。 结果表明, 该探测系统在1 320到1 400 nm波长范围内, 分辨本领小于10 nm,波长准确性小于1 nm, 系统稳定性小于0.5%, 光栅光调制器的响应频率为5kHz。 实验结果证明了该近红外光谱探测系统的可行性, 为研制基于微机电系统光栅光调制器的微型化近红外光谱仪提供了理论基础及实验指导。Light Modulators

A novel near-infrared spectrum detection system based on grating lightmodulators is proposed in the present paper. A new spectrum detection method thatcombines MEMS grating light modulators with a single near infrared detector isapplied in the system, which can avoid using costly near infrared detector array.Firstly, the optical structure of the spectra detection system was designed.Secondly, the spectra detection principle of this system was addressed in detailthat with a series of voltages actuated on the grating light modulators array,the optical energy of each wavelength is reflected onto the single near-infrareddetector by corresponding grating light modulator pixel orderly and thetransmission spectra can be acquired after a scanning period. Finally, thegrating light modulators array device was fabricated by surface micromachiningprocessing and a near-infrared spectra detection system was set up to test thekey parameters such as resolving power, wavelength accuracy, system stability andresponse characteristics of grating light modulators. The experimental resultsilluminated that the spectrum range of this spectra detection system is from 1320 to 1 400 nm, the resolving power is below 10nm, the wavelength accuracy iswithin 1nm,the stability of the system is below 0.5% and the response frequencyis 5 kHz. The results of theory analysis and experiments demonstrated thefeasibility of the spectra detection system. It could give theoretical andexperimental guidance to the design and fabrication of miniature near-infraredspectrometer based on grating light modulators.MEMS