为了对高速运动测量装置进行校准，研制了一种闭环控制的高速运动测量机，该测量机可根据需要设定运动参数，按照正弦波和三角波速度曲线进行高速运动。高速运动测量机采用了花岗岩工作台和空气静压导轨技术，其高速驱动控制系统采用直线电机和PMAC运动控制卡，并以反射式钢带光栅作为位移检测和反馈控制传感器。采用铷原子钟作为控制数据采集的时间基准，通过精密时间间隔发生器同步控制基于现场可编程门阵列(FPGA)的高速数据采集系统，实现对位移的高速数据采集。试验表明，采用正弦波和三角波速度曲线进行高速运动时，高速运动测量机在300 mm行程的速度已分别达到5.3 m/s和7.6 m/s，最大位移跟随误差分别为-1.56~1.01 mm和-1.41~2.23 mm。该测量机可用于高速运动装置的校准测量。

A high-speed movement measuring machine controlled by a closed-loop system was developed to calibrate high-speed movement measuring devices.The machine could be set motion parameters and could do high-speed movement according to sine wave and triangular wave velocity curves.A granite service platform and aerostatic bearing sliders were used in the measuring machine and a linear motor and a PMAC motion controlling card were used in its high-speed drive system.Furthermore,the reflective steel grating scale was taken as a sensor to detect the displacement and feedback control.A rubidium atomic clock was used as the time basis of a high-speed data acquisition system,then the high-speed data acquisition of the displacement was implemented by the high-speed data acquisition system based on the Field Programmable Gate Array(FPGA) controlled by a high precision time interval generator.Experimental results show that the speeds of the measuring machine reach 5.3 m/s and 7.6 m/s, respectively, while it moves the distance of 300 mm according to the sine wave and triangular wave velocity curves, and the displacements following error range are -1.56-1.01 mm and -1.41-2.23 mm, respectively.These results show that the measuring machine can be used in the calibration of high-speed movement devices.