为了研究熔石英元件体内非吸热性杂质导致损伤和光束质量下降，采用时域有限差分法计算杂质散射光场和分步傅里叶算法计算散射光场非线性传输的方法，得到了半径在入射波长量级的气泡和氧化锆杂质可放大光场振幅约1.6和1.9倍，且经非线性传输光场会分裂，调制会加深的结果。结果表明，元件体内杂质可导致元件后表面的损伤和光束质量的下降。

For the purpose of studying the damage and beam quality deterioration caused by the non-absorbing inclusions in the fused silica optics, the scattering and the nonlinear propagation of the light field were simulated by finite difference time domain and split Fourier arithmetic respectively. The simulation shows the voids and zirconia inclusions in radius comparable to the wavelength amplify the electromagnetic field amplitude by about 1.6 and 1.9 and after the nonlinear transportation the modulation increases and the beam splits. The results present that the bulk inclusions could cause damage at the rear surface and deterioration of the beam quality.