利用Nd:YAG 纳秒激光(波长分别为355、532 和1 064 nm)辐照由电子束蒸发技术制备的类金刚石(DLC)薄膜，通过光学显微镜、光学轮廓仪和拉曼光谱仪等分析了辐照后的薄膜样品，结果表明：不同波长的单脉冲激光辐照时，DLC 膜的激光损伤阈值不同；同一波长的多脉冲激光辐照时，损伤阈值低于单脉冲辐照阈值；脉冲激光辐照对DLC 膜具有改性作用，受辐照薄膜区域表层发生了石墨化、剥落和气化效应， 致使DLC 膜表面出现了隆起和弹坑，隆起高度和弹坑深度与激光能量密度大小和脉冲个数有关。

Diamond-like Carbon (DLC) films prepared by electron beam evaporation deposition were irradiated with a Nd:YAG pulsed laser, operating at different wavelengths(λ=355 nm, 532 nm, 1 064 nm). Different methods including optical microscope, optical profiler and Raman spectrometer were employed for analyzing the films. The results show that the damage threshold energy density for DLC film flashed by a single laser pulse of different wavelengths is different, and the damage threshold for DLC film flashed by the multipulses laser of same wavelengths is lower. DLC films are modified after laser irradiation. The profile of the irradiated surface shows swelling and crater, resulting from superposition of three laser-induced processes-graphitization, spallation and evaporation. Swelling height and crater depth were determined by laser energy density and the number of laser pulses.