测试了经化学蚀刻、紫外激光预处理及其共同处理后的熔石英355 nm激光损伤阈值；研究了处理前后其损伤斑面积随激光辐照脉冲数的增长情况。结果表明, 处理后熔石英355 nm激光损伤阈值得到了提高, 且损伤斑面积增长变慢。利用CO2激光对熔石英表面损伤点进行了修复处理, 修复后的损伤点R-on-1抗损伤阈值和基底阈值相当, 损伤增长得到有效抑制。

Laser-induced damage threshold of fused silica under 355 nm laser were measured before and after chemical etching, UV laser conditioning, and the combined processing. The area of damage spots increased with successive pulses irradiation. The results showed that the laser-induced damage threshold of processed samples increased while the area growth rate decreased. Mitigation of damage sites on fused silica by localized CO2 laser treatment was also investigated. The laser-induced damage threshold of treated damage sites was as high as the fused silica substrate by R-on-1 tests. The damage growth of treated sites on fused silica was mitigated effectively.