研究了影响玻璃质光学元件表面质量的主要因素，认为表面微裂纹是表面强度改变的主要原因。用机械磨削初成形工艺方法分析研究了表面微裂纹产生的原因；通过裂纹尖端应力集中及Griffith能量平衡理论，分析了裂纹扩展方式；结合表面结构缺陷理论及研磨处理表面微缺陷工艺，阐述了HF腐蚀法对微裂纹的去除机理及效果；最后，综述了通过生产工艺提高玻璃强度的方法，重点讨论了离子交换法，镀膜法和HF腐蚀法等表面处理技术,指出使用HF腐蚀法去除表面微裂纹更适用于玻璃质光学元件的表面加工。

The reasons which effect on the surface quality of vitreous optics was investigated and the surface micro-crakes were regarded as a main source that could change the surface strength. The causes of the surface micro-cracks were analyzed based on the mechanical grinding and forming process, then, the crack tip stress concentration and the Griffith energy balance theory were used to analyze the crack propagation mode. Combined with the surface structure defect theory and grinding crafts, the removal mechanism of micro-cracks and the effect of HF etching method were described. Finally, the methods to enhance glass strength by manufacture technology were proposed, which focus on the some surface processing, such as ion exchanging, coating and HF eting. It suggests that the HF etching would be more suitable for the removal of surface micro-cracks in processing the vitreous optics.