光学学报, 2010, 30 (11): 3133, 网络出版: 2010-11-16
槽型衍射光栅结构参数优化设计研究 下载: 527次
Research of Optimization Design of Groove Diffraction Grating Profile Parameters
衍射光栅 严格的耦合波理论 优化设计 遗传算法 diffraction grating rigorous coupled-wave-theory analysis (RCWA) optimization design genetic algorithm (GA)
摘要
通过工程优化方法与衍射光栅矢量理论相结合, 对衍射光栅的结构参数进行了优化设计研究。采用严格的耦合波矢量理论分析表面浮雕光栅的衍射效率特性, 并建立了具有全局寻优特性的遗传算法在衍射光栅设计中的数学模型; 研究了包括双闪耀光栅在内的多种槽型衍射光栅的优化设计。优化设计表明, 该方法对初始设计方案没有特殊要求, 能够快速得到多种槽型衍射光栅的最优结构参数, 优化后光栅的衍射效率可以达到90%以上, 双闪耀光栅经优化设计以后在整个波段均能获得很高的衍射效率。在光栅的设计过程中采用全局工程优化算法进行分析设计, 为高效率光栅的制作提供了理论指导; 同时也为光栅设计的逆问题提供了一种可行的求解方法。
Abstract
The optimization design of structural parameters for diffraction grating is researched by combining the diffraction grating vector theory and the global optimization theory. Rigorous coupled wave analysis (RCWA) is used to analyze the grating diffraction efficiency properties, then the global optimization genetic algorithm (GA) model in the design of diffraction grating is established. The optimized structural parameters of several typical gratings including double-blazed grating in arbitrary incident angle are given. There are no special requirements for initial design and optimal groove diffraction grating structure can be obtained quickly. Optimized diffraction efficiency can reach more than 90%. Double-blazed grating can also get very high diffraction efficiency in the whole band after the optimization. The global engineering design optmization algorithm provides theoretical guidance for grating fabrication and also provides a feasible method for the inverse problem of grating design.
樊叔维, 周庆华, 李红. 槽型衍射光栅结构参数优化设计研究[J]. 光学学报, 2010, 30(11): 3133. Fan Shuwei, Zhou Qinghua, Li Hong. Research of Optimization Design of Groove Diffraction Grating Profile Parameters[J]. Acta Optica Sinica, 2010, 30(11): 3133.