针对径向偏振光入射, 设计了三维超分辨衍射光学元件。对径向偏振光大数值孔径聚焦特性的分析表明, 纵向分量是影响聚焦主瓣的三维光强分布的主要因素。仅考虑径向偏振光聚焦场的纵向分量, 沿用线偏振光入射时三维超分辨衍射光学元件的全局优化方法, 利用线性规划设计了三维超分辨的0, π结构的纯相位元件。考虑径向偏振光聚焦场的径向和纵向分量, 计算了三维超分辨性能。与线偏振光的性能对比表明, 尽管仅考虑聚焦场纵向分量设计的衍射光学元件不是全局最优解, 但其三维超分辨性能明显优于线偏振光, 证明了仅考虑径向偏振光聚焦场的纵向分量进行三维超分辨衍射光学元件优化的有效性。

Three-dimensional superresolution diffractive optical elements (DOE) are designed for incidences of radially polarized light. The analysis of focusing properties of the radially polarized beam in the high numerical aperture focusing system shows that the longitudinal component of the focused radially polarized light dominates the three-dimensional intensity distribution of main lobe. Based on the global optimization method, three-dimensional superresolution DOE for the linearly polarized beam with 0 and π binary phase distribution are designed by linear programming method. Three-dimensional superresolution performances are calculated considering both transverse and longitudinal components of the focused radially polarized light. Although the optimized DOE may not be globally optimal for the radially polarized light, simulation results show that the radially polarized beam can realize better superresolution performances than the linearly polarized light, which also validates the optimization method for three-dimensional superresolution DOE considering only the longitudinal component of the focused radially polarized beam.