为了有效地表征和评价光学元件局部小尺度波前畸变, 提出了能同时反映空间频率和空间位置的Wigner分布函数评价方法。通过理论分析Wigner分布函数与功率谱密度之间的关系, 得到了局部波前畸变的评价方法和指标。模拟计算和实验结果验证了该方法的有效性, 并表明: 该方法不但能判断光学元件的中频误差是否满足惯性约束聚变系统要求, 而且还能确定不满足要求的特定区域, 从而有效地指导光学元件的返修。

In order to characterize and specify small-scale local wavefront deformation of optical component, a method based on Wigner distribution function has been proposed, which can describe wavefront deformation in spatial and spatial frequency domain. The relationship between Wigner distribution function and power spectral density is analyzed and thus the specification of small-scale local wavefront deformation is obtained by Wigner distribution function. Simulation and experiment demonstrate the effectiveness of the proposed method. The proposed method can not only identify whether the optical component meets the requirement of inertial confinement fusion(ICF), but also determine the location where small-scale wavefront deformation is unqualified. Thus it provides an effective guide to the revision of unqualified optical components.