探索了一种新的微透镜阵列制作工艺，使用二氧化碳激光在聚甲基丙烯酸甲酯（PMMA）表面进行选区刻蚀，研制出表面光洁、尺寸和曲率可控的微透镜阵列，并研究了其成形机理和加工特点。PMMA表面受激光照射区域被汽化蒸发，熔融PMMA在液面张力的作用下，凝固后与未扫描区域形成弧形边缘，当圆形未扫描区域表面被完全熔化后整个液面呈球状凸起，冷凝后形成透镜。透镜曲率半径随单位面积输入能量增加而减小。含有杂质较多或表面清洁度不达标的PMMA在激光照射下发生反应产生气泡和坏点，导致透镜质量降低。

The experiment developed a novel method of microlens array preparation on polymethyl methacrylate (PMMA), which can fabricate the microlens with smooth surface, and the radius of curvature and size of lens could be controled by changing laser machining parameters. Laser irradiation induced glass evaporation and vaporization, so the liquid glass surface tranformed to sphere shape with the effect of surface tension. A microlens formed after the surrounded liquid glass cooling down. The lens radius of curvature could be minished with the laser output enhanced. But when the PMMA was impure or dirty, the microlens were bad with airballes and failure points.