红外高光谱的应用对于微型集成滤光片的需求越来越明显。通过改变间隔层的光学厚度，保持基本膜系不变，在1.9～2.4 μm 的红外光谱范围内设计了32通道的集成滤光片。间隔层的改变可以采取刻蚀或镀膜的方法来实现。考虑到制作工艺中存在的误差，利用光学薄膜设计软件对误差和可行性进行了分析。各个光谱通道的半峰全宽在5~8 nm，光谱交叠多在15%以下。在现有工艺条件下，采取刻蚀法或镀膜法均能实现红外集成滤光片的制作。

There are more and more demands for micro integrated filter because of the infrared hyperspectral application. In 1.9~2.4 μm infrared spectrum, 32-channnel integrated infrared filter is designed by changing the thickness of spacer layer and maintaining the basic optical layers the same. The change of the spacer layer can be realized by etching or depositing. Considering the error during fabricating, the spectrum can still meet the requirements. The half power bandwidth is 5~8 nm, the spectrum curve across-points are lower than 15% in transmittance mostly. With the current technique, both the etching and the depositing methods can be used to fabricate the integrated infrared filter.