光学学报, 2011, 31 (1): 0112003, 网络出版: 2010-12-24
非球面测量中零位计算全息的测量不确定度分析研究
Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1
测量 非球面 波像差 标准球面 抛物面 干涉测量 measurement aspheric surface wave-front aberration standard sphere paraboloid interferometric test
摘要
非球面在光学系统中具有非常重要的作用。基于零位补偿计算全息(CGH)的干涉测量方法,因精度高、信息量大、调校方便,在光学计量和制造业领域受到广泛重视。以F数为4抛物面为测量样品,以光学计量领域比较成熟的平面、球面波象差,采用自准直方法,测出抛物面面形波象差;再用零位补偿CGH方法测量同一块样品,研究零位补偿CGH的误差传递数据。通过主要原理误差分析与计算,在光学熔融石英平面基底上制作零位补偿CGH,测量不确定度达到λ/10\[峰谷值(PV), λ=0.6328 μm\],满足非球面波象差光学计量的要求。
Abstract
Aspheric surface acts as an important role in optical system. Because of its high precision, large data information and easy alignment, interferometric measurement method based on null computer-generated hologram (CGH) element is widely emphasized in the field of optical metrology and optical manufacture. A paraboloid acting as a special aspheric surface sample is measured in auto-collimated interferometric path by using flats and transmission spheres. Then error data are obtained by means of measuring the same sample with null-CGH in interferometric path. By the calculation of major error data, a conclusion that the measurement uncertainty can reach λ/10(λ=0.6328 μm)which meets the requirement of optical metrology if null-CGH is made in a flat of fused silica with enough thickness.
王小鹏, 高志山, 马骏, 沈华, 马云. 非球面测量中零位计算全息的测量不确定度分析研究[J]. 光学学报, 2011, 31(1): 0112003. Wang Xiaopeng, Gao Zhishan, Ma Jun, Shen Hua, Ma Yun. Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1[J]. Acta Optica Sinica, 2011, 31(1): 0112003.