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补偿器法检测非球面过程中易出现的误区

The Mistake during the Process of Testing Aspheric Mirror Using Compensator

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摘要

补偿器法是测量非球面反射镜面形误差的一种重要的方法。在检测过程中,各个元件之间的调整会带来初级像差,这是影响最终检测结果的一个关键因素。本文以一个1 m 口径的非球面反射镜为例,首先详述了其面形误差检测的设计和测量过程,然后分析了各个元件的调整会带来相应的初级像差,随后给出了实际检测过程中出现的误区,并对其进行了分析和讨论,结合实际的检测过程得出了相应的判断和消除的方法。最后,分别对300 mm、700 mm 口径非球面反射镜与本文1 m 非球面镜的检测结果进行了比较,证明了该误区会使最后的检测数据发生变化,从而使最后的检测结果失真,并验证了先判别后消除方法的可靠性。最后利用正确的方法,检测得到1 m口径非球面被测镜的RMS 面形误差为0.038λ,满足指标要求。

Abstract

The method of compensator, a common and important means, which could test figure error of aspheric mirror, is applied more frequently at home and abroad. And alignment of every optical element could introduce primary aberrations, which will influence the final test result. This paper expatiated the test process with compensator, which gave an illustration of 1 meter aspheric mirror, and analyzed some corresponding primary aberrations that were brought by alignment, and enumerated the mistake of test process. Then, corresponding method of judging and elimination was educed. Finally, according to the comparison of the figure error test ofФ 300mm, Ф300 mm andФ1m aspheric, it was proved that the mistake would distort the result of measurement, which validated the reliability of the method of judging and elimination. And with the correct method, the figure error of final test result is 0.038λ.

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补充资料

中图分类号:TH75;TN247

所属栏目:先进光学制造技术

基金项目:中国科学院三期创新基金资助项目(O65X32C060)

收稿日期:2010-07-16

修改稿日期:2010-08-17

网络出版日期:0001-01-01

作者单位    点击查看

明 名:中国科学院 长春光学精密机械与物理研究所,长春 130033
杨 飞:中国科学院 长春光学精密机械与物理研究所,长春 130033
陈宝刚:中国科学院 长春光学精密机械与物理研究所,长春 130033
李剑锋:中国科学院 长春光学精密机械与物理研究所,长春 130033
林旭东:中国科学院 长春光学精密机械与物理研究所,长春 130033

联系人作者:明名(mingm1118@yahoo.com.cn)

备注:明名(1983-),男(汉族),湖南临澧人。助理研究员,硕士,主要研究工作是大口径光学系统的设计、检测与装调工作

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引用该论文

MING Ming,YANG Fei,CHEN Bao-gang,LI Jian-feng,LIN Xu-dong. The Mistake during the Process of Testing Aspheric Mirror Using Compensator[J]. Opto-Electronic Engineering, 2010, 37(10): 116-121

明 名,杨 飞,陈宝刚,李剑锋,林旭东. 补偿器法检测非球面过程中易出现的误区[J]. 光电工程, 2010, 37(10): 116-121

被引情况

【1】郭春凤,苏显渝,陈文静,雷柏平. 一种新的非球面零朗奇检测法. 光学学报, 2012, 32(8): 812002--1

【2】韩光宇,曹立华,高云国,乔健,薛向尧. 1 m望远镜主反射镜的支撑和装配. 光学 精密工程, 2012, 20(9): 1922-1928

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