将157 nm激光微加工制作的微光纤珐-珀腔贴于悬臂梁结构构成加速度传感器。通过设计特定的悬臂梁结构和FFT方法,该加速度传感器的分辨率约为1.13 mg/Hz1/2。通过采用MUSIC算法处理信号,信噪比可提高45 dB,系统分辨率约为3.56×10-2 μg/Hz1/2。该微光纤珐-珀传感器具有可批量制作、成本低、抗高温、量程灵活等优点,有望应用于石油勘探、地震测量等领域中。

A miniature Fabry-Perot cavity fabricated by 157 nm laser micro-processing mounted on a cantilever beam structure is used as an accelerometer. By using specific cantilever structure and FFT method, the resolution ratio of the F-P sensor accelerometer is about 1.13 mg/Hz1/2. By adopting MUSIC algorithm, the signal to noise ratio of such a sensor system is increased 45 dB and the resolution ratio achieved is about 3.56×10-2 μg/Hz1/2. The sensor can be mass produced with low cost, high-temperature-resistant, flexible range, and is anticipated to be used in the field of oil exploration, seismic surveying, etc.