光学学报, 2011, 31 (2): 0212005, 网络出版: 2011-01-30
多模脊形光波导的制备及其耦合对准和损耗测量系统
Fabrication of the Muti-Mode Rib-Waveguide and Its Coupling and Wasting Measurement System
摘要
垂直腔面发射激光器,目前在光互连中有着越来越广泛的应用。是一种波长为850 nm的多模激光器,其光输出截面达50 μm×50 μm,为了更好的匹配该器件,需要研制大截面多模脊形波导,并且为了满足芯片间光互连的需求,对互连波导长度具有较高的要求。通过改进制备工艺,研制了直线长度为21 cm的多模聚硅氧烷脊形波导,并成功完成了通光实验;搭建了一套对波导完全无损伤的测量系统,实现了对多模脊形光波导的无损伤测量,测得损耗平均值为约0.18 dB/cm, 并利用传统的截断法进行了验证。此外,该系统还可以用于不可见光波段的耦合对准。
Abstract
Nowadays, an important device called vertical cavity surface emitting laser is applied into optical interconnection more and more widely, it works at 850 nm and its output cross section is 50 μm×50 μm. In order to fit to this device, a muti-mode rib waveguide with a big cross section is needed. And the distance among chips needs longer the waveguide. A waveguide which is 21 cm long with a big section is fabricated through advancing the making technology and light can go through it successfully. A measurement system is also designed and the average wasting of the waveguide as 0.18 dB/cm is gotten which is verified through cutting-off method. Also, this system can be applied to adjusting the coupling of the waveguide input with invisible light.
温昌礼, 季家镕, 冯向华, 宋艳生, 窦文华. 多模脊形光波导的制备及其耦合对准和损耗测量系统[J]. 光学学报, 2011, 31(2): 0212005. Wen Changli, Ji Jiarong, Feng Xianghua, Song Yansheng, Dou Wenhua. Fabrication of the Muti-Mode Rib-Waveguide and Its Coupling and Wasting Measurement System[J]. Acta Optica Sinica, 2011, 31(2): 0212005.