基于ZnO薄膜吸收光谱的温变特性，设计了一种反射式光纤温度传感器。该传感器以镀于蓝宝石三棱镜面上的ZnO薄膜作为敏感材料，采用三棱镜、凸透镜和位于凸透镜焦点处的光纤端面相配合的结构以及相应的反射式光路。室温至500 ℃范围测试实验表明，所设计的传感器的温度曲线线性拟合度达99.3%以上，灵敏度优于0.05 nm/℃。该传感器的理论测温范围可达10 K~1000 K，稳定性高，适用于实际工作环境中的宽温变范围温度测量。

A reflective optical fiber temperature sensor is highly developed on the basis of the temperature-dependent character of ZnO thin film′s optical absorption spectra. ZnO thin film as sensing material is deposited on a sapphire triangular prism surface by the electron-beam evaporation technique. And then the triangular prism and a fiber-ending located at a convex lens′ focus are employed in the mode of a reflective optical configuration. According to the measurement results, the goodness-of-fit of the sensor′s temperature curve is above 99.3%, and the sensitivity of the sensor is beyond 0.05 nm/℃ when the temperature varies from 300 K to 773 K. Moreover, this temperature sensor is steady enough for a wide temperature range measurement in the experiment, even from 10 K to 1000 K.