误差滤波和分离技术是超精密加工中的关键技术之一。采用误差递减法修正加工路径,利用修正的高斯权函数对测量表面进行滤波处理,设计并完成了整个误差递减系统,实现非球面的超精密车削加工,并在很大程度上提高其表面精度(P-V值)。通过实验验证,利用该加工方法,提高了加工效率,可明显地提高非球面的表面精度,最终达到面形精度小于200nm。

Error filtering and separating methods are the key technology in ultra-precision machining. Using error-decreasing method to amend the processing path, improving the Gaussian weight function to get better filtering effect, and designing a complete system to realize the machining process, all of which increase the form accuracy of aspheric mirror to a large extent. A large number of various non-spherical surfaces machined prove that the value of PV can be improved to be less than 200 nm.