激光与光电子学进展, 2011, 48 (4): 040401, 网络出版: 2011-03-24
InGaAs探测器偏振响应特性的实验研究
Experimental Study on Polarization-Dependent Response of InGaAs Photodetector
探测器 半导体器件物理 光电探测器 偏振响应 敏感度 detectors semiconductor device physics photo-detector InGaAs InGaAs polarization response sensitivity
摘要
分析了光电探测器偏振响应产生的原因,定义了探测器偏振敏感度的公式,制备了测试用InGaAs探测器。为了测试器件的偏振敏感度,搭建了测试系统,并对器件的偏振敏感特性进行了测试。结果表明,测试系统具有较好的稳定性;器件响应存在明显的偏振特性,正入射时器件的偏振敏感响应为0.27 dB,斜入射时器件偏振敏感有所增加,入射角度为10°时达到0.41 dB。
Abstract
Response characteristic of photodetector, which is caused by polarization state of incident light, is analyzed. The calculation formula of polarization-dependent sensitivity is deduced, and an InGaAs detector is fabricated for the experimental test. In order to test the polarization-dependent sensitivity of photodetector, an experimental system is established, and the polarization-dependent sensitivity of the InGaAs detector is measured. The results indicate that the experimental system has a good stability and the polarization-dependent sensitivity of the InGaAs detector is 0.27 dB under normal incidence,while 0.41 dB under 10° oblique incidence.
唐恒敬, 李永富, 李雪, 龚海梅. InGaAs探测器偏振响应特性的实验研究[J]. 激光与光电子学进展, 2011, 48(4): 040401. Tang Hengjing, Li Yongfu, Li Xue, Gong Haimei. Experimental Study on Polarization-Dependent Response of InGaAs Photodetector[J]. Laser & Optoelectronics Progress, 2011, 48(4): 040401.