应用激光, 2011, 31 (1): 12, 网络出版: 2011-03-28   

高硼硅3.3玻璃和可伐合金的激光封接界面研究

Joining Behavior and Interface Analysis of Pyrex Glass-to-KOVAR Alloy with Fiber Laser
作者单位
北京工业大学激光工程研究院, 北京 100124
摘要
采用多道激光透射封接技术, 对大尺寸3.3高硼硅玻璃-可伐合金封接工艺进行了探索性研究, 采用正交实验方法, 实现了两种材料的可靠封接。确定了优化工艺参数:扫描速度为25mm/s, 激光功率为100W, 离焦量为+40mm, 扫描次数2次。通过使用SEM、EDX以及激光共聚焦显微镜观测硼硅玻璃-可伐合金的激光封接断面, 对比相图, 就结合界面的特征和机理进行了初步分析, Fe2SiO4化合物的形成是两者能够可靠封接的主要原因, 确定了两种材料的激光可封接性。
Abstract
The joining behavior and interface analysis of Pyrex Glass-to-KOVAR Alloy with fiber laser were studied in the paper. By the orthogonal experiment method, the optimized parameters of laser joining were obtained: scanning speed of 25mm/s, laser power of 100W, defocus distance of +40mm, scanning number of 2. The fractures graphs were observed by LEXT OSL 3000. By analyzing the FeO-SiO2-Fe phase diagram, SEM and EDX on the fractures, it displayed that a new chemical substances (Fe2SiO4) had formed which was considered as the key-materials for a good glass-to-KOVAR alloy joint.

涂冶, 季凌飞, 鲍勇, 蒋毅坚. 高硼硅3.3玻璃和可伐合金的激光封接界面研究[J]. 应用激光, 2011, 31(1): 12. Tu Ye, Ji Lingfei, Bao Yong, Jiang Yijian. Joining Behavior and Interface Analysis of Pyrex Glass-to-KOVAR Alloy with Fiber Laser[J]. APPLIED LASER, 2011, 31(1): 12.

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