中国激光, 2011, 38 (4): 0417001, 网络出版: 2011-04-02
梯度掺杂结构GaN光电阴极表面的净化
Cleaning of Gradient-Doping GaN Photocathode Surface
光电子学 表面净化 X射线光电子能谱仪 梯度掺杂 GaN光电阴极 激活 optoelectronics surface cleaning X-ray photoelectron spectroscopy gradient-doping GaN photocathode activation
摘要
对梯度掺杂结构GaN阴极表面进行了化学清洗,清洗后利用X射线光电子能谱仪(XPS)分析了阴极表面,分析表明化学清洗能有效去除阴极表面的油脂和加工中残存的无机附着物;然后在超高真空室内710 ℃下对阴极进行了高温退火清洁,去除化学清洗后残留在阴极表面的C、O等吸附物,使阴极表面达到制备高性能负电子亲和势(NEA)光电阴极所需的原子级清洁程度。最后通过阴极激活实验加以验证,结果证实化学处理后热退火方法能有效净化梯度掺杂结构GaN阴极表面。
Abstract
Successful cleaning procedures for gradient-doping GaN surface have been investigated and achieved. The chemical cleaning of the gradient-doping GaN photocathode surface is carried out. The analysis of the surface after the chemical cleaning with X-ray photoelectron spectroscopy (XPS) shows that the chemical cleaning can effectively remove the organic attachments, residues in the process on the surface. Subsequent annealing of the surface under ultra-high vacuum at temperature of 710 ℃ leads to a decrease in the residual carbon, so the photocathode can obtain the ideal atom clean surface for high-performance negative electron affinity (NEA) photocathode. Finally, the photocathode active experimental results confirm that thermal annealing after chemical treatment method can effectively clean the gradient-doping GaN photocathode surface.
李飙, 徐源, 常本康, 杜晓睛, 王晓晖, 高频, 张俊举. 梯度掺杂结构GaN光电阴极表面的净化[J]. 中国激光, 2011, 38(4): 0417001. Li Biao, Xu Yuan, Chang Benkang, Du Xiaoqing, Wang Xiaohui, Gao Pin, Zhang Junju. Cleaning of Gradient-Doping GaN Photocathode Surface[J]. Chinese Journal of Lasers, 2011, 38(4): 0417001.