中国激光, 2011, 38 (5): 0508003, 网络出版: 2011-05-09
点衍射干涉仪基准波前测试技术研究
Testing the Criterion Wavefront Diffracted by Point Diffraction Interferometer
测量 极紫外光刻 点衍射干涉仪 相位复原 扩展奈波尔-泽尼克 measurement extreme ultraviolet lithography point diffraction interferometer phase retrieval extended Nijboer-Zernike
摘要
针对点衍射干涉仪(PDI)的小孔衍射波前，提出了一种基于扩展奈波尔-泽尼克(Nijboer-Zernike)(ENZ)理论进行超高精度检测的方法。描述了点衍射干涉仪的工作原理和基于扩展Nijboer-Zernike多项式的相位恢复算法。分析了对光瞳函数利用Zernike多项式展开的方法。仿真实验中，当信噪比(SNR)为55 dB，采用10 bit模数转换时，得到的Zernike系数中代表波像差的虚部的恢复误差不大于3×10-5。从噪声和模数转换的角度通过模拟实验显示这种方法对实现小孔衍射波前超高精度的光学检测具有可行性。
Abstract
A new method based on extended Nijboer-Zernike (ENZ) theory is proposed for testing the wavefront diffracted by a pinhole in the point diffraction interferometer (PDI). The principle of PDI is described and the phase retrieval algorithm based on ENZ is put forward. The way in expansion of the pupil function with Zernike polynomial is analysed. In the simulation experiment, deviation in the image part of the Zernike coefficients obtained from the retrieval result is less than 3×10-5, when singal-to-noise (SNR) is 55 dB with a 10-bit analog-to-digital conversion. The effect of noise and the analog-digital conversion is only involved, the result in this simulation experiment just proves that testing the wavefront diffracted by a pinhole with this method is possible.
邵晶, 马冬梅. 点衍射干涉仪基准波前测试技术研究[J]. 中国激光, 2011, 38(5): 0508003. Shao Jing, Ma Dongmei. Testing the Criterion Wavefront Diffracted by Point Diffraction Interferometer[J]. Chinese Journal of Lasers, 2011, 38(5): 0508003.
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