中国激光, 2011, 38 (7): 0716001, 网络出版: 2011-06-03
ZnO温度传感器光谱监测系统的设计
Optical Design of Spectrum Observation System in ZnO Temperature Sensor
光学设计 交叉非对称切尔尼-特纳系统 温度传感器 球差 彗差 optical design cross-asymmetric Czerny-Turner system temperature sensor spherical aberration coma
摘要
为解决ZnO温度传感器测温精度和集成化的问题,设计了一套测量光谱范围为350~450 nm,分辨率为0.1 nm的光谱监测系统。通过合理地选择光学系统的结构、计算各光学元件的参数和光路结构以及消除系统像差,实现了光谱监测系统的窄波段、高分辨率的要求。最终结果显示系统的体积为111 mm×83 mm×30 mm,基本满足系统可集成化的要求,可以做进一步的优化,公差分析使之满足加工需求。
Abstract
In order to solve the measurement and integration of ZnO temperature sensor, a spectrum observation system is designed. Its spectrum range is 350~450 nm and resolution is approximately 0.1 nm. A reasonable optical structure is selected. Optical elements and light path are calculated and the aberration of system is eliminated to achieve the requirements of narrow spectrum range and high resolution. The system volume is 111 mm×83 mm×30 mm, satisfying the requirement of integration. And it can be used for further optimization, tolerance analysis to meet the processing requirements.
叶必卿, 汪飞, 隋成华, 鄢波, 石文渊. ZnO温度传感器光谱监测系统的设计[J]. 中国激光, 2011, 38(7): 0716001. Ye Biqing, Wang Fei, Sui Chenghua, Yan Bo, Shi Wenyuan. Optical Design of Spectrum Observation System in ZnO Temperature Sensor[J]. Chinese Journal of Lasers, 2011, 38(7): 0716001.