Chinese Optics Letters, 2011, 9 (10): 102301, Published Online: Jul. 13, 2011
Accuracy and analysis of long-radius measurement with long trace profiler Download: 734次
长程轮廓仪 大曲率半径 重复性 非线性误差 曲率半径测量极限 230.4040 Mirrors 120.6650 Surface measurements, figure 220.4840 Testing 340.6720 Synchrotron radiation
Abstract
The long trace profiler (LTP) is proposed to measure radius of curvature (R) and surface figure of a longradius spherical surface in an optical shop. Equipped with a motorized rotary stage and a two-dimensional tilt stage, the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method. Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results. The R-limit is validated and expressed as D/R, where D is the aperture of the mirror under test. A full-aperture three-dimensional figure is also reconstructed based on triangle interpolation.
Haixian Ye, Liming Yang. Accuracy and analysis of long-radius measurement with long trace profiler[J]. Chinese Optics Letters, 2011, 9(10): 102301.