光学 精密工程, 2011, 19 (6): 1320, 网络出版: 2011-07-18
音圈电机驱动的球面副支撑式快速控制反射镜设计
Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators
快速控制反射镜 球面副支撑 直线位移传感器 音圈电机 Fast-steering Mirror(FSM) spherical pair support distance sensor voice coil actuator
摘要
为了精确控制光束的传输方向,设计了一种以直线式音圈电机为驱动器的球面副支撑式快速控制反射镜(FSM)。在明确所需FSM系统功能和设计要求的基础上,分别对其机械结构、平面反射镜、驱动元件以及角度测量元件进行了设计和选择。完成精密加工、装配、调试后,对FSM系统进行了实验测试分析。结果表明,该球面副刚性支撑式FSM系统结构简单,承载能力强,谐振频率约为120 Hz,反射镜稳定精度优于2″,且对振动、冲击、回转等动态工作环境具有较强的适应性,满足系统使用要求。
Abstract
A Fast-steering Mirror(FSM) with a spherical pair supporting structure driven by linear voice coil actuators was designed to control the transmission direction of a laser precisely. The mechanical structure reflector, actuators and angle measurement elements of the system were designed and chosen, respectively, on the basis of functions and design requirements of the FSM. Then, the FSM system was tested and analyzed by experiments after finely manufacturing, assembling and adjusting. The results show that the FSM with the spherical pair supporting structure has simple structure and great carrying capacity,and its steady precision is more than 2″ and resonance frequency is about 120 Hz. Furthermore, the system has great adaptability to vibrancy, impact and rotation. Therefore, it can satisfy application requirements.
徐新行, 王兵, 韩旭东, 王恒坤, 刘廷霞. 音圈电机驱动的球面副支撑式快速控制反射镜设计[J]. 光学 精密工程, 2011, 19(6): 1320. XU Xin-hang, WANG Bing, HAN Xu-dong, WANG Heng-Kun, LIU Ting-xia. Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators[J]. Optics and Precision Engineering, 2011, 19(6): 1320.