激光与光电子学进展, 2011, 48 (8): 081404, 网络出版: 2011-07-21
大口径KDP晶体夹持方式对面形的影响
Mounting Ways and Surface Figure of Large-Aperture KDP Crystal
摘要
对大口径KDP晶体的夹持方式以及夹持对面形的影响进行了研究。利用ANSYS建立KDP晶体侧面和正面夹持的有限元模型。研究了侧面均布荷载、侧面均匀及非均匀两点荷载作用时KDP晶体面形,得出了总荷载大小是影响晶体面形的关键因素。讨论了理想状态和实际状态下KDP晶体正面夹持面形,得出了元件表面平面度是影响晶体夹持面形主要因素。通过分析和计算,找到了降低元件平面加工精度对晶体正面夹持面形影响的理论技术方案。
Abstract
The research of clamping modes to large aperture KDP crystal and influence on surface figure by different clamping modes are done. Utilizing ANSYS the finite element model to simulate the obverse clamping and the flank clamping of KDP crystal, has been founded. KDP surface figure acted by flankly distributed load, equal flank two-point load and unequal two-point load is researched, and the conclusion shows that the whole load amout is a key factor to surface figure. KDP surface figures both in ideal state and in actual state have been discussed, and the conclusion that artifactitious errors for obverse clamp are a key factor has been obtained. The theoretical project has been acquired to minish the effect on artifactitious errors.
曹庭分, 熊召, 徐旭, 倪卫, 袁晓东. 大口径KDP晶体夹持方式对面形的影响[J]. 激光与光电子学进展, 2011, 48(8): 081404. Cao Tingfen, Xiong Zhao, Xu Xu, Ni Wei, Yuan Xiaodong. Mounting Ways and Surface Figure of Large-Aperture KDP Crystal[J]. Laser & Optoelectronics Progress, 2011, 48(8): 081404.