光学学报, 2011, 31 (8): 0812010, 网络出版: 2011-07-29
一种精确测量光学球面曲率半径的方法 下载: 1003次
A Method for Testing Radius of Curvature of Optical Spheric Surface
测量 光学测量 光学球面 曲率半径 激光跟踪仪 干涉仪 measurement optical testing optical spheric surface radius of curvature laser tracker interferometer
摘要
在简要总结各种检测光学球面曲率半径方法优缺点的基础上,提出了利用激光跟踪仪和激光干涉仪测量光学球面曲率半径的新方法。首先,通过激光跟踪仪精确定位测量干涉仪出射球面波前的焦点和待测球面镜的曲率中心点坐标,再调整待测球面镜与干涉仪的相对位置,使待测球面镜达到零条纹干涉状态,用激光跟踪仪测定此时待测球面镜上多点的位置坐标,通过计算分析即可得到待测球面镜的曲率半径。研究和分析了这种测量光学球面曲率半径方法的基本原理,并提出了针对凸球面镜曲率半径的多区域测定平均综合优化的方法。结合实例对一口径为400 mm的球面透镜进行了曲率半径的测量,测量得到其两面曲率半径分别为1022.283 mm(凸面)和4069.568 mm(凹面),并将该透镜进行了轮廓法测量对比,其相对误差都小于0.05%。
Abstract
On the basis of summing up conventional testing methods for the radius of curvature of optical sphere, a novel method using laser tracker and interferometer is proposed. The focus of the exit spheric surface wave front and the coordinate of curvature center of the testing spheric surface are tested by a laser tracker. After adjusting the spheric surface and the interferometer, the coordinates of many points on the spheric surface are tested, and then the radius of curvature of the spheric surface can be calculated by the data. The basic principle and theory of the method are researched, and the synthetical optimization method for testing radius of convex spheric surface is proposed. An optical lens with the aperture of 400 mm is tested by the method. The radius of the convex surface is measured to be 1022.283 mm, and that of the concave surface is 4069.568 mm. For comparison and validation, the spheric surface is also tested by a profilometer, and the relative errors for both surfaces are less than 0.05%.
王孝坤, 郑立功. 一种精确测量光学球面曲率半径的方法[J]. 光学学报, 2011, 31(8): 0812010. Wang Xiaokun, Zheng Ligong. A Method for Testing Radius of Curvature of Optical Spheric Surface[J]. Acta Optica Sinica, 2011, 31(8): 0812010.