半导体光子学与技术, 2003, 9 (4): 256, 网络出版: 2011-08-12
New Method for 2D Image Edge-detection in Layer-layer 3D Testing System
New Method for 2D Image Edge-detection in Layer-layer 3D Testing System
摘要
Abstract
A new method based on the material removal and cross-section optical scanning is investigated.The advantage of this method is that the internal and external information of the specimen can be obtained at same precision. In order to eliminate the pulse and Gaussian noise, the multi-scale dyadic wavelet methods are presented and discussed. The experimental results show that the multi-scale dyadic wavelet methods can successfully extract the features from noise image.The accuracy of 2D edge detection is 5.4μm with the resolution of 2.7 μm.
YANG Yu-xiao, XIONG Kai-li, ZHOU Jian, ZHAO Ming-tao, TAN Yu-shan. New Method for 2D Image Edge-detection in Layer-layer 3D Testing System[J]. 半导体光子学与技术, 2003, 9(4): 256. YANG Yu-xiao, XIONG Kai-li, ZHOU Jian, ZHAO Ming-tao, TAN Yu-shan. New Method for 2D Image Edge-detection in Layer-layer 3D Testing System[J]. Semiconductor Photonics and Technology, 2003, 9(4): 256.