半导体光子学与技术, 2005, 11 (1): 61, 网络出版: 2011-08-18
Piezoresistive Sensors Based on Carbon Nanotube Films
Piezoresistive Sensors Based on Carbon Nanotube Films
摘要
Abstract
Piezoresistive effect of carbon nanotube films was investigated by a three-point bending test. Carbon nanotubes were synthesized by hot filament chemical vapor deposition. The experimental results showed that the carbon nanotubes have a striking piezoresistive effect. The relative resistance was changed from 0 to 10.5×10-2and 3.25×10-2for doped and undoped films respectively at room temperature when the microstrain under stress from 0 to 500. The gauge factors for doped and undoped carbon nanotube films under 500 microstrain were about 220 and 67 at room temperature, respectively, exceeding that of polycrystalline silicon (30) at 35℃. The origin of the resistance changes in the films may be attributed to a strain-induced change in the band gap for the doped tubes and the defects for the undoped tubes.
LV Jian-wei, WANG Wan-lu, LIAO Ke-jun, WANG Yong-tian, LIU CHang-lin, Zeng Qing-gao. Piezoresistive Sensors Based on Carbon Nanotube Films[J]. 半导体光子学与技术, 2005, 11(1): 61. LV Jian-wei, WANG Wan-lu, LIAO Ke-jun, WANG Yong-tian, LIU CHang-lin, Zeng Qing-gao. Piezoresistive Sensors Based on Carbon Nanotube Films[J]. Semiconductor Photonics and Technology, 2005, 11(1): 61.