半导体光子学与技术, 2007, 13 (1): 69, 网络出版: 2011-08-18
Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3Intensity Modulator
Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3Intensity Modulator
摘要
Abstract
The characteristics of a conventional LiNbO3intensity modulator made up of a Mach-Zehnder (MZ) type annealed proton exchange(APE) waveguide and coplanar waveguide(CPW) modulation electrode are presented. The APE waveguide characteristics and their relations with process parameters are analyzed. At the same time, the electrical characteristics of modulation electrode, such as modulation voltage, microwave effective index associated with modulation bandwidth, characteristics impedance, are also investigated in detail.
HE Jian, ZHU Xue-jun. Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3Intensity Modulator[J]. 半导体光子学与技术, 2007, 13(1): 69. HE Jian, ZHU Xue-jun. Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO3Intensity Modulator[J]. Semiconductor Photonics and Technology, 2007, 13(1): 69.