半导体光子学与技术, 2006, 12 (3): 173, 网络出版: 2011-08-18
Optical Measurement System for Motion Characterization of Surface Mount Technology
Optical Measurement System for Motion Characterization of Surface Mount Technology
Interferometry Stroboscopic imaging Computer microvision Dynamic measurement MEMS reliability Solder wetting
摘要
Abstract
Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures has been demonstrated. Stop-action images of a target have been obtained with computer microvision, microscopic interferometry, and stroboscopic illuminator. It can be developed for measuring the in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures. A new algorithm of sub-pixel step length correlation template matching is proposed to extract the in-plane displacement from vision images. Hariharan five-step phase-shift interferometry algorithm and unwrapping algorithms are adopted to measure the out-of-plane motions. It is demonstrated that the system can measure the motions of solder wetting in surface mount technology(SMT).
LI Song, AN Bing, ZHANG Tong-jun, XIE Yong-jun. Optical Measurement System for Motion Characterization of Surface Mount Technology[J]. 半导体光子学与技术, 2006, 12(3): 173. LI Song, AN Bing, ZHANG Tong-jun, XIE Yong-jun. Optical Measurement System for Motion Characterization of Surface Mount Technology[J]. Semiconductor Photonics and Technology, 2006, 12(3): 173.