采用电子束光刻和感应耦合等离子刻蚀等工艺，研制了一种基于绝缘硅材料的的微环谐振可调谐滤波器.滤波器微环半径为5 μm左右，波导截面尺寸为(350～500 nm)×220 nm不等.测试结果表明，波导宽度为450 nm时器件性能最为理想，其自由频谱宽度为16.8 nm，1.55 μm波长附近的消光比为22.1 dB.通过对微环滤波器进行热光调制，在21.4 ℃～60 ℃温度范围内实现了4.8 nm波长范围的可调谐滤波特性，热光调谐效率达到0.12 nm/℃.研究了基于单环和双环的多通道上下载滤波器，实验结果表明多通道滤波器的信号传输存在串扰，主要是不同信道之间的串扰，尤其在信号上载时，会在相邻信道产生较大串扰.

Microring-resonator filters were fabricated based On Silicon on Insulator (SOI) nano-wire waveguide, adopting Electron-Beam photolithography (EBL) and Inductive-Coupled-Plasma (ICP) etching technology, etc. The cross-section size of the strip waveguides were (350～500 nm)×220 nm, respectively, and the bending radius of the microring was around 5 μm. The measured results show that performance of devices are much better with waveguide width 450 nm, the free spectral range (FSR) is 16.8 nm, and extinction ratio (ER) around the wavelength 1 550 nm is 22.1 dB. After thermally tuned, the tuning bandwidth reaches 4.8 nm, and the tuning efficient is 0.12 nm/℃. Meanwhile, multi-channel filters were fabricated and studied based on single-ring and double-ring. After experiments, some conclusions were drawn: crosstalk exists in the signal transmission in multi-channel filters, mainly among different transmission channels, and the crosstalk is fairly distinct when there are signals input to add ports.