光子学报, 2011, 40 (8): 1172, 网络出版: 2011-08-29   

基于相位凝固技术的激光反馈干涉术

Optical Feedback Interferometry Based on Phase-freezing Technology
作者单位
1 北京航空航天大学 仪器科学与光电工程学院,北京 100191
2 微纳测控与低维物理教育部重点实验室,北京 100191
3 北京信息科技大学 光电信息与通信工程学院,北京 100192
摘要
针对激光反馈干涉术,提出基于相位凝固技术的调制解调方法,用以提高位移测量的分辨率,并设计了利用相位调制器进行调制的位移测量系统.利用调制器进行外腔相位调制,采集调制相位相对固定的干涉光信号,通过解调重构得到被测的位移信息.进行了信号调制、采样、重构技术的研究以及误差分析,并通过仿真验证了方法的可行性.结果表明,采用5点相位凝固采样技术,测量准确度可以达到λ/20.此方法可提高激光反馈干涉术的测量分辨率,实现信号实时采集处理,可用于位移的实时测量.
Abstract
For optical feedback interferometry, a modulation and demodulation method based on phase-freezing technology was brought forward to increase the measurement resolution. And a displacement measurement system with phase modulator was designed. The phase of the outer cavity was modulated by the modulator, and interference signals that have fixed modulation phases were collected. Then displacement information of the target can be observed by demodulation and reconstruction. Signal modulation, sampling, reconstruction technology and error analysis were studied, and the feasibility of this method was verified by simulation. The results demonstrate that the accuracy can be up to λ/20 using five-point phase-freezing sampling. This method can enhance the accuracy of optical feedback interferometry, and process signals in real time. So it can be used in real time displacement measurement.

刘惠兰, 张晓青, 曹文娟, 王俊杰. 基于相位凝固技术的激光反馈干涉术[J]. 光子学报, 2011, 40(8): 1172. LIU Hui-lan, ZHANG Xiao-qing, CAO Wen-juan, WANG Jun-jie. Optical Feedback Interferometry Based on Phase-freezing Technology[J]. ACTA PHOTONICA SINICA, 2011, 40(8): 1172.

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