本文介绍了长春光学精密机械研究所研制成功的四台衍射光栅刻划机。该机自1958年开始设计。1号、2号光栅刻划机为机械型,分别于1959年、1965年安装调试完毕。3号、4号光栅刻划机为光电干涉控制型,分别于1970年、1975年制成,每台光栅刻划机都有自己的特点。4号机连续运动时的锁相误差平均为1/100条纹,个别的最大不超过1/36条纹。利用这些类型的光栅刻划机已刻划出许多平面光栅,最大的刻划宽度达185毫米,刻线密度从每毫米60条到1200条。实测分辨本领最高达20万,相对效率最高达90％,一级罗兰鬼线最低为4×10~(-5),赖曼鬼线观察不到。

The four diffraction grating ruling engines developed in Changchun Institute of Optics and Fine Mechanics are described. The design of the 1st engine started in 1958. The 1st and 2nd engines are mechanical engines. They were built up at 1959 and 1965 respectively. The 3rd and 4th engines are photoelectrically controlled engines. They were built up in 1970 and 1975 respectively. Each engine has its special constructional features. The 4th engine has phase look error of about 1/100 fringe in average in the case of continuous carriage motion and 1/36 fringe in maxinmm. Many plane diffraction gratings have been produced from these engines. The maximum ruling width is 185 mm among these gratings. The ruling density is from 60 l/mm to 1200 l/mm. Practical resolving power is up to 200,000, relative efficiency up to 90%, relative intensity of Rowland ghost down to 4×lO-5 in 1st order. Lyman ghost is not observable.