本文描述了一种设计计算二元光栅结构参数的数值方法,这种方法可以把光栅衍射谱的分布误差控制在1%以内.作为实验验证,本文给出了一个二元光栅谱分布的测试结果,该光栅将入射平面波转换成在中央11×11级次内均匀分布的衍射波.

We derive a numerical method of calculating binary grating structures, which have predetermined gjatial spectra with a typical accuracy of less than one percent. As an experimental verification, we present test results of a grating that converts a plane wave into a central block of 11×11 uniformly diffracted waves.