电激励连续波 DF化学激光器使用质量流量控制器作为流量监控系统时, 对其输出功率与 N2气、主 He、NF3气、副 He、 D2气的流量关系进行了研究。考虑到激光器的输出不稳定性和功率计的测量误差, 实现了激光器基模最大输出功率约为12.5W, 连续运行时间约 30 min。并与使用浮子流量计做为流量监控系统的同一激光器的输出功率进行了比较, 结果显示, 使用质量流量控制器时, 流量稳定性更高, 激光器可以输出更高功率, 且具有更好的功率稳定性。

The relationship between output power of discharge exited CW DF chemical Laser when mass flux controller is used asflux monitoring system andN2, main -He, NF3, assistant -He,D2 is investigated. Considering output instability of the laser andmeasurement error of power meter, maximum output power about 12.5W and continuous running time about 30min of the laserfundamental mode is realized. Compared with output power of the same laser when rotameter in use, higher mass flux stability was gotand the laser can output higher power and has the better output stability when mass flux controller in use.