应用激光, 2011, 31 (3): 228, 网络出版: 2011-10-13
紫外激光精细加工应用研究
Application of UV Laser Micro-Processing
摘要
采用纳秒级紫外 DPSS激光和具有机器视觉定位功能的多轴高精度加工系统, 对不锈钢、镍片、铍铜、聚酰亚胺等多种材料进行切割和打孔试验。通过调节离焦量、扫描速度、扫描次数, 实现了 0.1 mm的金属薄板和聚合物薄膜的加工, 取得了切缝光滑的加工效果, 并且具有加工精度高、热效应小等特点。对不同材料的作用机理和工艺实验结果进行了分析, 结果表明, 紫外 DPSS激光在铜类材料和聚合物类材料的加工上具有优势。
Abstract
In this paper, nanosecond UV DPSS laser with multi-axis machine vision precision positioning machining system has beenused for cutting and drilling the materials of stainless steel, nickel plate, beryllium copper, and polyimide. By adjusting the defocusingdistance, scan speed, scan times, to achieve the 0.1mm thick metal sheet and polymer film processing, has gottena smooth kerfprocessing effects with high precison and minimal heat -affected zones. Mechanism of different materials and process experimentalresults were analyzed, the results show that UV DPSS laser has the advantages in processing copper-like materials and polymer-likematerials
骆公序, 陈俊, 王国庆, 潘涌, 姜兆华. 紫外激光精细加工应用研究[J]. 应用激光, 2011, 31(3): 228. Luo Gongxu, Chen Jun, Wang Guoqing, Pan Yong, Jiang Zhaohua. Application of UV Laser Micro-Processing[J]. APPLIED LASER, 2011, 31(3): 228.