设计并制备了离子交换单模条波导，用于激发等离子体表面波。研究了波导设计过程中相关参数的确定方法、条波导制备过程涉及的二维扩散问题，折射率分布以及等离子体表面波的激发等。基于Ag+-Na+离子交换技术在德国B270光学玻璃上制备出渐变型平面波导，采用余误差函数拟合其折射率分布，得到了一定工艺参数下的光波导扩散系数Deff与折射率增量值Δn。在此基础上，利用等效折射率法给出单模波导条件，设计相应的工艺参数，以光刻技术为核心在0.1%AgNO3~99.9%NaNO3混合熔融盐中实验制备了单模条波导，并进行模场分布测试。结果表明,制得的单模条波导具有良好的单模特性; 在此波导上镀50 nm的金膜，采用40%~70%的甘油溶液进行测试，可激发等离子体表面波。

An ion-exchange single-mode stripe waveguide was designed to excite the surface plasma wave.The experimental determination method of relative parameters,the two-dimensional diffusion and refractive index distribution of the stripe waveguide and the excitation of surface plasma wave were investigated. Based on Ag+-Na+ ion-exchange technology, the planar waveguide with a graded refractive index was prepared on Germany B270 optical glass. By taking a complementary error function to fit the refractive index distribution, the diffusion coefficient (Deff) and the refractive index increment (Δn) of the waveguide were obtained under certain process parameters. On this basis, the condition of single-mode waveguide was calculated by using equivalent refractive index method and the corresponding technological parameters were designed. Finally,the single-mode strip waveguide was prepared in the 0.1% AgNO3~99.9％NaNO3 mixed molten salt based on the lithographic technology. The test result of mode field distribution shows that the waveguide prepared has a good single-mode characteristic. When the waveguide is coated with 50 nm Au film,and tested by glycerine solution with different concentrations from 40% to 70%, it can excite surface plasma waves successfully.