光学 精密工程, 2011, 19 (11): 2582, 网络出版: 2011-12-05
光学成像系统光学波前的高精度测试
Accurate test of optical wave front for optical imaging system
光学检测 光学成像系统 光学波前 光瞳函数 出瞳振幅分布 相位复原 optical testing optical imaging system optical wavefront pupil function amplitude in the exit pupil phase retrieval
摘要
基于扩展奈波尔-泽尼克理论,分析了不同出瞳振幅分布情况对光学系统焦面处光强分布的影响。针对光学成像系统出瞳振幅实际分布状态,提出了一种新的测试光学波前的方法,解决了相位恢复算法中出瞳振幅分布不均匀和快速傅里叶变换引入计算误差的问题。通过测评实验,对一光学系统进行了测试,获得的光学系统出瞳波前(PV)值为0.196 5λ,RMS值为0.022 4λ(测试波长λ=632.8 nm),此波前中主要含有像散、彗差和高阶像散等像差。该方法亦可用于分析光学系统出瞳振幅分布,数值计算其他焦面处的光强分布。测评实验证明了此方法的有效性。
Abstract
Based on the Extended Nijboer-Zernike theory, the effect of different amplitudes for exit pupils on the image intensity in the focal plane was analyzed. A novel approach was applied to testing the wavefront according to the actual condition of the amplitude in the exit pupil, which can help eliminating the error caused by the nonuniformity illuminated pupil and the Fast Fourier Transform in the original phase retrieval algorithms. A testing experiment was performed on an imaging optical system, and obtained results show that the tested wave fronts in the exit pupil of a camera lens are 0.196 5λ in PV and 0.022 4λ in RMS (the testing wavelength λ is 6328 nm). The aberrations in the wavefront are mainly astigmatism, coma and high order astigmatism. Furthermore, the approach can also be used to analyze the amplitude in the exit pupil of a camera lens and calculate the light intensity distribution on other focal planes. The experiment proves this approach available.
邵晶, 马冬梅, 聂真威. 光学成像系统光学波前的高精度测试[J]. 光学 精密工程, 2011, 19(11): 2582. SHAO Jing, MA Dong-mei, NIE Zhen-wei. Accurate test of optical wave front for optical imaging system[J]. Optics and Precision Engineering, 2011, 19(11): 2582.