Nd-doped phosphate glass is the dominant amplifier material used in solid state high average power laser systems. Surface imperfection and subsurface damage (SSD) of the glass, resulting from the optical fabrication process, limit the increment of laser system energy output. Thus, it is important to enhance the surface damage threshold of Nd-doped phosphate glass surface. The in°uence of abrasive size, polishing powder, grinding mode, and chemical treatment on the laser-induced damage threshold (LIDT) of Nd-doped phosphate glass surface is investigated. Results show that the LIDT is affected little by different polishing powders and grinding modes. The LIDT correlates with the abrasive size, which produced different depths of SSD. A suitable acid etching treatment can remove the imperfection and the SSD for improving the LIDT of Nd-doped phosphate glass surface. The combination of several effective techniques and methods, which are low-cost and practical, should be useful to enhance the LIDT of Nd-doped phosphate glass surface.