中国激光, 2011, 38 (s1): s108008, 网络出版: 2011-12-19  

采用双波长相移干涉测量光学非均匀性的研究

Measurement of Optical Inhomogeneity with Dual-Wavelength Phase-Shifting Interferometry
作者单位
山东大学信息科学与工程学院光学工程系, 激光技术与应用山东省重点实验室, 山东 济南 250100
摘要
传统光学非均匀性测量方法无法避免样品表面平行度、表面面形和系统误差所造成的影响。基于洛伦兹洛伦茨色散公式,对材料的光学非均匀性与光波长的关系进行了分析,发现不同光波长下的光学非均匀性之差远小于实际应用中对光学元件光学非均匀性的精度要求。根据这一分析结果及材料的色散特性,提出了采用双波长相移干涉实现光学非均匀性绝对测量的方法,给出了测量原理与实现方法,并通过计算机模拟实验和光学实验验证了该方法的正确性与可行性。
Abstract
Traditional measurement of optical inhomogeneity always obtain a globle inhomogeneity including surface parallelism, surface shape and systematic errors. Based on the Lorentz-Lorenz dispersion equation, the relationship between optical inhomogeneity and wavelength is analyzed. The difference of optical inhomogeneity in different wavelengths is much smaller than the required precision of optical components′ inhomogeneity in practical application, according to which and optical material′s dispersion properties, absolute measurement method of optical inhomogeneity with dual-wavelength phase-shifting interferometry is proposed. The measurement principle and the proposed formula are both confirmed in computer simulation and optical experiment.

郑箫逸, 王玉荣, 王青圃, 李杰, 杜延龙. 采用双波长相移干涉测量光学非均匀性的研究[J]. 中国激光, 2011, 38(s1): s108008. Zheng Xiaoyi, Wang Yurong, Wang Qingpu, Li Jie, Du Yanlong. Measurement of Optical Inhomogeneity with Dual-Wavelength Phase-Shifting Interferometry[J]. Chinese Journal of Lasers, 2011, 38(s1): s108008.

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