MOEMS（micro optical electronic mechanical system）微镜面阵光谱仪主要利用微镜面阵分时选通实现单个探测器光谱测量， 具有无需斩波器实现脉冲信号输出， 无需机械模板实现哈达吗调制， 象元分辨率高， 体积小， 成本低等优点。 针对MOEMS微镜面阵光谱仪设计中， 狭缝尺寸与光通量之间的矛盾， 本文系统深入的分析该光谱仪微型结构引入的新影响因素， 获取最优值， 实现光谱分辨率改进。 首先， 提出了衍射限制， 空间采样率和谱面内弯曲对分辨率的影响， 模拟仿真， 获取最优参数。 最后， 搭建实验， 进行测试。 结果表明: 微型光谱仪中， 谱面内弯曲影响较小; 衍射受限导致光谱分辨率无法进一步改善; 空间采样率要求光谱光学分辨力至少是象元分辨力的两倍; 综合评价的狭缝最优值为1.818 μm， 象元分辨力为2.278 6 nm。

A MOEMS micro-mirror spectrometer, which uses micro-mirror as a light switch so that spectrum can be detected by a single detector, has the advantages of transforming DC into AC, applying Hadamard transform optics without additional template, high pixel resolution and low cost. In this spectrometer, the vital problem is the conflict between the scales of slit and the light intensity. Hence, in order to improve the resolution of this spectrometer, the present paper gives the analysis of the new effects caused by micro structure, and optimal values of the key factors. Firstly, the effects of diffraction limitation, spatial sample rate and curved slit image on the resolution of the spectrum were proposed. Then, the results were simulated; the key values were tested on the micro mirror spectrometer. Finally, taking all these three effects into account, this micro system was optimized. With a scale of 70 mm×130 mm, decreasing the height of the image at the plane of micro mirror can not diminish the influence of curved slit image in the spectrum; under the demand of spatial sample rate, the resolution must be twice over the pixel resolution; only if the width of the slit is 1.818 μm and the pixel resolution is 2.278 6 μm can the spectrometer have the best performance.