强激光与粒子束, 2011, 23 (12): 3283, 网络出版: 2012-01-04
激光直写制作高阶螺旋相位板及其性能
Performance of high-order spiral phase plate made by direct laser writing lithography
衍射光学元件 螺旋相位板 光学涡旋 计算全息 激光直写 diffraction optical element spiral phase plate optical vortex computer-generated hologram direct laser writing
摘要
将拓扑荷为4的螺旋相位光束与平面光干涉的计算全息图输入到空间光调制器中,得到含有多个衍射级次的高阶涡旋光束。为提高衍射效率,利用激光直写技术制作拓扑荷为4的高阶螺旋相位板,经测定,相位板深度理论数值为1.073 μm,测量数值为1.082 μm,相位板制作误差在0.83%以内。平行光束通过此相位板时,在夫琅和费衍射场获得一个高质量的高阶光学涡旋,光强分布与理论数值基本吻合,衍射效率达到86%。
Abstract
A computer-generated hologram about spiral phase light beam with four topological charges is realized, which is then inputted into spatial light modulators(SLMs). When a plane wave transits through the SLMs, a series of high-order optical vortices occur. In order to improve the diffraction efficiency, a spiral phase plate(SPP) with four topological charges is created by direct laser writing lithography. The theoretical depth of SPP is 1.073 μm and the measured depth is 1.082 μm, showing a manufacture error of no more than 0.83%.The efficiency and beam profile of Fraunhofer diffraction of the SPP are measured with a power meter and a CCD camera. The diffraction efficiency reaches 86% and the energy distribution is in a good agreement with theory.
范长江, 徐建程, 任志君, 应朝福, 王辉. 激光直写制作高阶螺旋相位板及其性能[J]. 强激光与粒子束, 2011, 23(12): 3283. Fan Changjiang, Xu Jiancheng, Ren Zhijun, Ying Chaofu, Wang Hui. Performance of high-order spiral phase plate made by direct laser writing lithography[J]. High Power Laser and Particle Beams, 2011, 23(12): 3283.