利用Nd∶KGW激光器，采用光束扫描宽化技术和掩模微缩成像方法研制了用于微打标及微型零件雕刻成形的激光掩模微加工系统。系统采用计算机打印的塑料胶片或液晶作掩模，光束扫描面积为(有效掩模面积)30 mm×30 mm。微缩成像系统的缩小倍率分别为8～10倍(f=100 mm透镜)和15～20倍(f=50 mm透镜)。对该系统的加工尺寸和加工精度进行了分析。实验结果表明：系统达到的最小标刻宽度和加工图形精度均为10 μm，与分析结果一致。系统的单次加工深度为007～01 μm，最大加工深度为200 μm，可满足工业微加工技术的基本要求。

Based on a Nd∶KGW laser, a beamscanning widening technique and a mask microimaging method, a laser mask micromachining system is developed to applied to the micromarking, carving and forming of miniature workpieces. The plastic film printed by a computer or the liquid crystal are used as masks in the system, and the beamscanning area(effective mask area) is determined as 30 mm×30 mm. The focal lengths of microimaging system are selected as 100 mm and 50 mm, which scale down 8～10 and 15～20 times, respectively. The processing size and precision of the system are analyzed, and results indicate that both the minimum marking width and graphic precision of the micromachining system are 10 μm, which is consistent with the analysis results. The processing depth of a single laser pulse is 007～01 μm, and the maximum processing depth is 200 μm. The micromachining system satisfies the basic requirements of industrial micromachining technology.