激光与光电子学进展, 2012, 49 (4): 041204, 网络出版: 2012-01-19
径向剪切干涉仪系统的研制与校准研究
Development and Calibration of a Radial-Shearing Interferometer
光学测量 径向剪切干涉仪 实验研究 校准 optical measurement radial-shearing interferometer experimental study calibration
摘要
为了测量超长焦距高功率激光系统的波前畸变,研制并校准了基于空间相位调制的径向剪切干涉仪。仪器采用多波长设计,满足可见光和红外探测的需要。为研制并校准径向干涉仪,同哈特曼夏克(HS)传感器、Zygo干涉仪进行了对比实验。通过实验与理论对比,得到径向剪切干涉仪参数的最佳值。研究了汉宁窗的取值范围和边缘截取值的合理范围,结果表明,校准后的径向剪切干涉仪能够准确测量,仪器的重复性和精度都能满足高精度波前探测要求。
Abstract
To measure the wavefront of high-power laser with ultra-long focal length, we develop and calibrate a shearing interferometer based on spatial phase modulation. It is experimentally compared with Hartmann-Shack (HS) wavefront sensor and Zygo interferometer. The results show that the shearing interferometer can meet the requirements of precisely measuring wavefront. It has high precision and good repetitiveness.
赵琦, 蒋泽伟, 何勇, 卢峰. 径向剪切干涉仪系统的研制与校准研究[J]. 激光与光电子学进展, 2012, 49(4): 041204. Zhao Qi, Jiang Zewei, He Yong, Lu Feng. Development and Calibration of a Radial-Shearing Interferometer[J]. Laser & Optoelectronics Progress, 2012, 49(4): 041204.